The Hitachi S570LB Scanning Electron Microscope (SEM) provides high resolution inspection and documentation over a range of magnification from X10 to X70,000. The SEM has a much greater resolution, depth of field and working distance than is possible with optical microscopes.  Multiple detectors and acceleration voltages image various aspects of the sample: the secondary electron detector (SED) images the surface topography; the backscatter electron detector (BED) images the elemental distribution; low acceleration voltages (~ 1,000 volts) images surface films and contamination.  Low acceleration voltage allows inspection of non-conductive samples without gold or carbon coating required by classical high voltage SEM inspected. The option of coating sample for high resolution is available using a sputter coater or evaporator.  Samples for SEM analysis are limited in size, approximately 3 inches, and must be exposed to high vacuum during inspection.

Instrumentation Details:

Hitachi S570LB Scanning Electron Microscope (SEM) provides high-resolution inspection and documentation over a much greater resolution, depth of field and working distance that is possible with optical microscopes. Magnification – 10 to 70,000 times Acceleration Voltage - 500 to 30,000 volts.

Energy Dispersive Spectroscopy (EDS) – PGT Imix EDS provides elemental identification and quantitative measurements.